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Publication

32

Statistical Lagrangian particle tracking approach to investigate the effect of thermophoresis on particle deposition onto a face-up flat surface in a parallel airflow

Journal of Aerosol Science 44: 1-10

31

Experimental investigation of submicron and ultrafine soot particle removal by tree leaves

Atmospheric Environment 45: 6987-6994

30

Enhancement of collection efficiency of inertial impactors using elliptical concave impaction plates

Journal of Aerosol Science 42: 898-908

29

Effect of plate thickness on particle deposition velocity onto a face-up flat plate situated parallel to an airflow

Journal of Applied Physics 110: 063518

28

Numerical investigation of thermophoretic effect on particulate contamination of an inverted flat surface in a parallel airflow

Journal of The Electrochemical Society 158(10): H1010-H1016

27

Experimental investigation of particle deposition on face-up surfaces of wafers and EUVL photomasks exposed to a parallel airflow

Journal of The Electrochemical Society 158(10): H973-H978

26

Optimum design of a radial heat sink under natural convection

International Journal of Heat and Mass Transfer 54: 2499-2505

25

Correlations and optimization of a heat exchanger with offset-strip fins

International Journal of Heat and Mass Transfer 54: 2073-2079

24

Deposition velocity onto an inverted flat surface in a laminar parallel flow

Aerosol Science and Technology 44(11): 919-929

23

Particle deposition velocity onto a face-up flat surface in a laminar parallel flow considering Brownian diffusion and gravitational settling

Journal of Aerosol Science 41(10): 911-920

22

Particle deposition velocity onto a wafer or a photomask in a laminar parallel flow

Journal of the Electrochemical Society 157(6): H692-H698

21

Natural convection around a radial heat sink

International Journal of Heat and Mass Transfer 53(13-14): 2935-2938

20

Film flow around a fast rotating roller

International Journal of Heat and Fluid Flow 30(4): 796-803

19

Nanoparticle contamination control for EUVL-technology: especially for photomasks in carriers and scanners

Proceedings of SPIE 7364: 73640N

18

Gaussian diffusion sphere model to predict mass transfer due to diffusional particle deposition on a flat surface in laminar flow regime

Applied Physics Letters 94: 191909

17

Frost behavior on a fin considering the heat conduction of heat exchanger fins

International Journal of Heat and Mass Transfer 52(11-12): 2581-2588

16

Classification of highly monodisperse nanoparticles of NIST-traceable sizes by TDMA and control of deposition spot size on a surface by electrophoresis

Journal of Aerosol Science 39: 537-548

15

Controlled deposition of SiO2 nanoparticles of NIST-traceable particle sizes for mask surface inspection system characterization

IEEE Transactions on Semiconductor Manufacturing 21(2): 238-243

14

Controlled deposition of NIST-traceable nanoparticles as additional size standards for photomask applications

Proceedings of SPIE 6922: 69220G

13

Experimental investigations on particle contamination of masks without protective pellicles during vibration or shipping of mask carriers

IEEE Transactions on Semiconductor Manufacturing 20(4): 578-584