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4

Speed-controlled particle injection into a low-pressure system

Journal of Vacuum Science & Technology A 24(2): 229-234

Authors : JH Kim, H Fissan, C Asbach, SJ Yook, DYH Pui Year : 2006

3

Analytical modeling of particle stopping distance at low pressure to evaluate protection schemes for extreme ultraviolet lithography masks

Applied Physics Letters 87: 234111

Authors : C Asbach, JH Kim, SJ Yook, DYH Pui, H Fissan Year : 2005

2

Modeling of protection schemes for critical surfaces under low pressure conditions: comparison between analytical and numerical approach

Journal of Vacuum Science & Technology B 23(6): 2419-2426

Authors : C Asbach, DYH Pui, JH Kim, SJ Yook, H Fissan Year : 2005

1

Protection schemes for critical surface in vacuum environments

Journal of Vacuum Science & Technology A 23(5): 1319-1324

Authors : JH Kim, C Asbach, SJ Yook, H Fissan, K Orvek, A Ramamoorthy, PY Yan, DYH Pui Year : 2005